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Full Survey Chemical Analysis of Thin Films with Pulsed Fast Flow Glow Discharge Mass Spectrometry

Full Survey Chemical Analysis of Thin Films with Pulsed Fast Flow Glow Discharge Mass Spectrometry

Application Note 30267. High resolution glow discharge mass spectrometry is broadly recognized as one of the most sensitive and robust analytical techniques for direct bulk trace element determinations. However, due to the nature of the magnetic field, scan speed is traditionally considered to be a limiting factor for depth specific measurements and thus unsuitable for thin film or layer analysis.

Technique: Trace Elemental Analysis Resource Type: Application Note
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